The company uses these systems for research and development purposes, and so far, Intel has processed tens of thousands of wafers using them. Intel installed and started using two High-NA EUV ...
Sixth People’s Hospital, School of Medicine & School of Biomedical Engineering, Shanghai Jiao Tong University, Shanghai 200030, P. R. China Centre for Personalized Nanomedicine, Australian Institute ...
Centre for Integrative Semiconductor Materials (CISM), Faculty of Science and Engineering, Swansea University─Bay Campus, Fabian Way, Swansea SA1 8EN, U.K. Centre for Integrative Semiconductor ...
In the past decade, color centers in silicon carbide (SiC) have emerged as promising platforms for various quantum information technologies. There are three main types of color centers in SiC: silicon ...
Third, the fabrication process needs to be improved to meet the criteria for wafer process lines. Currently, most reported results are laboratory research using the lift-off method to fabricate metal ...
This DSA process has some issues, as unwanted residue tends to disperse on the wafer. So in response, Leti and its partners have qualified a new, third-generation PS-b-PMMA material set. The group has ...
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