This article describes the basic optical principles in the lithographic tool, with the resulting positioning accuracy requirements. For three generations of lithographic tools, the mechatronic ...

I expect that within five years we will all have the option of a smart, always available, personal assistant. A good model ...

Electricity had become one of the most essentials in life. The need for electricity keeps increasing. It has become a challenge to maintain this service evenly to everyone around the world. The high ...