This letter presents a CMOS compatible micro flow sensor (MFS) that operates in a thermal feedback (TF) mode. The proposed MFS contains four parallel polysilicon resistors on the micro bridges. The ...

Electronic gas flow meters are expected to replace the current mechanical devices. One of the promising solutions is based on thermal MEMS sensor. In this paper, a novel system is introduced that ...

Adafruit invests time and resources providing this open source code, please support Adafruit and open-source hardware by purchasing products from Adafruit! Written by Kevin (KTOWN) Townsend for ...