This paper presents analytical and experimental studies of a new microelectromechanical system (MEMS) smart flow sensor for the measurement of gas flow. The flow sensor has an array of curved-up ...

Up to 4,608 signal contacts and an array of modules adapts the mass-interconnect device to interface a wide range of inputs ...

A smart system for flow measurement is presented, consisting of a micromachined thermal flow sensor combined with a smart front-end electronic interface. The flow sensor is based on a novel thermal ...

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