Flowchart of the proposed algorithm for speeding up the aerial image simulations in computational lithography. By scaling up the input data appropriately, one can apply the fast Fourier transform ...

OLID image on the right. Scale bar: 5 μm. d The flowchart of OLID-SDOM. The data of four modulation cycles at each pixel were transformed by 1D Fourier transform, and then we extracted the ...