The first step is to coat a wafer with a layer of e-beam resist. [Zach] used PMMA, commonly known as acrylic plastic, and applied it using spin coating after dissolving it in anisole. He then ...
PMMA, polymethyl-methacrylate, is a thermoplastic acrylic linear polymer, the mer of which is illustrated in the diagram. PMMA is transparent, with a refractive index of 1.49, and easily formed into ...
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